Cluster Defect
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![[PDF] Defect cluster recognition system for fabricated semiconductor ...](https://d3i71xaburhd42.cloudfront.net/1fc0be3a3382759bffecb8df220caf5ec063ee2d/12-Figure11-1.png)



























































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![5: Different defect clusters [33] | Download Scientific Diagram](https://www.researchgate.net/profile/Kaouthar-Ahmouda/publication/362482570/figure/fig3/AS:1185466825084931@1659648724878/Different-defect-clusters-33_Q640.jpg)





















