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Fabrication process flow: (a) Cavity and bottom electrode formation ...
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Fabrication process flow: (a) Cavity and bottom electrode formation ...
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![15: Process flow of the proposed packaging method in [36]. | Download ...](https://www.researchgate.net/publication/348363693/figure/fig14/AS:978298347728897@1610255910211/Process-flow-of-the-proposed-packaging-method-in-36.jpg)
