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![A schematic view of the micropump proposed in Reference [12] and ...](https://www.researchgate.net/publication/332515009/figure/fig1/AS:749207933685760@1555636499611/A-schematic-view-of-the-micropump-proposed-in-Reference-12-and-adopted-in-the-present_Q640.jpg)

















![Design proposed by Besharatian et al[12], involves a single electrode ...](https://www.researchgate.net/profile/Karthik-Kumar-7/publication/267595091/figure/fig1/AS:295095988441089@1447367774175/Design-of-a-2-stage-vacuum-micropump-as-proposed-by-Kim-et-al-9-and-Astle-et-al-6_Q320.jpg)












![Design of a 2 stage vacuum micropump as proposed by Kim et al [9] and ...](https://www.researchgate.net/profile/Karthik-Kumar-7/publication/267595091/figure/fig1/AS:295095988441089@1447367774175/Design-of-a-2-stage-vacuum-micropump-as-proposed-by-Kim-et-al-9-and-Astle-et-al-6.png)










































![(a) 3D schematic of proposed micropump in [102] and (b) its fabricated ...](https://www.researchgate.net/profile/Mohsen_Annabestani/publication/332439524/figure/fig17/AS:748161912016896@1555387108202/a-3D-schematic-of-proposed-micropump-in-102-and-b-its-fabricated-version.jpg)







