W Gate Cmp Scratch
![Chatter mark scratches observed in STI CMP [33]. | Download Scientific ...](https://www.researchgate.net/profile/Jin-Goo_Park/publication/274734006/figure/download/fig5/AS:391804949155851@1470424987588/Chatter-mark-scratches-observed-in-STI-CMP-33.png?_sg=FTi1WQd-fb4os1BxW9yfW2EyClwbbugISvcKi8kml0k5IfiYsyIob_vyyQSdSyMsG-1-7vwyfTw "W Gate Cmp Scratch")
![Potential causes of CMP defects and possible solutions [33]. | Download ...](https://www.researchgate.net/publication/274734006/figure/tbl1/AS:391804953350177@1470424988452/Potential-causes-of-CMP-defects-and-possible-solutions-33.png "W Gate Cmp Scratch")
![Chatter mark scratches observed in STI CMP [33]. | Download Scientific ...](https://www.researchgate.net/profile/Jin-Goo_Park/publication/274734006/figure/fig16/AS:391804953350155@1470424988080/Categories-of-different-types-of-scratches-observed-in-fused-silica-sample-Reproduced_Q320.jpg "W Gate Cmp Scratch")
![Potential causes of CMP defects and possible solutions [33]. | Download ...](https://www.researchgate.net/profile/Jin-Goo-Park/publication/274734006/figure/tbl2/AS:391804953350178@1470424988604/Critical-scratch-length-and-number-on-ITRS-2010-36_Q320.jpg "W Gate Cmp Scratch")
![Chatter mark scratches observed in STI CMP [33]. | Download Scientific ...](https://www.researchgate.net/profile/Jin-Goo_Park/publication/274734006/figure/fig9/AS:391804949155856@1470424987722/Surface-roughness-of-the-polished-wafer-Reproduced-from-Ref-48-with-permission-from_Q320.jpg "W Gate Cmp Scratch")
![Potential causes of CMP defects and possible solutions [33]. | Download ...](https://www.researchgate.net/profile/Jin-Goo-Park/publication/274734006/figure/fig3/AS:391804949155845@1470424987348/Schematic-diagram-showing-the-polishing-mechanism-and-the-criterion-for-material-removal_Q640.jpg "W Gate Cmp Scratch")
![CL images of the variation of scratches along [11 2ˉ 0] from the (a ...](https://www.researchgate.net/publication/364140904/figure/fig8/AS:11431281208081400@1701378789651/CL-images-of-the-variation-of-scratches-along-11-2-0-from-the-a-as-scratched-sample.jpg "W Gate Cmp Scratch")
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