Sputtering Threshold

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the physical sputtering erosion rates for the various regions of the

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Schematic of the different sputtering profiles between a a

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The same sputtering yield data of Au as those in figure 6 by a He

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Accurate argon clusterion sputter yields Measured yields and effect

Sputter yields of monoatomic solids by Ar and Ne ions near the

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a SEM image of the conventional sputtercoated grating exhibiting a

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