Si Oxide Interface
![[(a)–(c)] Scheme of the fabrication of Si NCs in the gate oxide by ion ...](https://www.researchgate.net/profile/Karl-Heinz-Stegemann/publication/224082097/figure/fig4/AS:289182510534661@1445957891290/a-c-Scheme-of-the-fabrication-of-Si-NCs-in-the-gate-oxide-by-ion-irradiation.png "Si Oxide Interface")
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