Selective Etching Of Sin Over Sio2

Highly selective etching of SiNx over SiO2 using ClF3Cl2 remote plasma

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Highly selective etching of SiNx over SiO2 using ClF3Cl2 remote plasma

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Highly selective etching of SiNx over SiO2 using ClF3Cl2 remote plasma

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Selective etch of SiO2 over InP a Experimental result of plasma

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