Rf Current

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a Schematic representation of an RF current probe b Equivalent

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Frequency response of the RF current at the entrance of the output

1 Fundamental RF current amplitude of a conventional amplifier versus

RF current calculated for electrode and measured at chamber wall

Calculated rf current as a function of time in the rf cycle thick

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RF current distribution for typical geometries of electrodes

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RF stray currents path red dashed line in the current configuration

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Electrical RF current at the middle of the RF pulse 15 s A and C

a The output power versus applied current graph b The RF spectrum

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RF stray currents path red dashed line in the current configuration

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RF current distribution for typical geometries of electrodes

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a Rf rms voltage and b current measured as functions of rf power at

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a Schematic of sample stack showing the direction of RF current and

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Amplitude of the rf current dc component as a function of time

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a Model geometry the rf current is flowing along the z direction H

Experimental arrangement for RF capacitive current measurements

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Hooge parameter as a function of the injected rf current frequency for

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n this case the fundamental component of the RF current is 22

Calculated electrical current at the rf electrode as a function of time

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One cycle of the RF current i and voltage V T signals applied to

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a Model geometry the rf current is flowing along the z direction H

a Schematic representation of an RF current probe b Equivalent

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