Micro Pump Design
![Schematics of micro pumps: (a) micro gear pump (according to [33]); (b ...](https://www.researchgate.net/publication/286330640/figure/fig6/AS:650844227776540@1532184764875/Schematics-of-micro-pumps-a-micro-gear-pump-according-to-33-b-spiral-channel.png "Micro Pump Design")
![Design of a 2 stage vacuum micropump as proposed by Kim et al [9] and ...](https://www.researchgate.net/publication/267595091/figure/fig1/AS:295095988441089@1447367774175/Design-of-a-2-stage-vacuum-micropump-as-proposed-by-Kim-et-al-9-and-Astle-et-al-6.png "Micro Pump Design")
![Layers and components of designed micropump in [97]. | Download ...](https://www.researchgate.net/publication/332439524/figure/fig13/AS:748161912025088@1555387108030/Layers-and-components-of-designed-micropump-in-97.jpg "Micro Pump Design")
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