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![(a) MEMS structures with interdigitated electrode [7]. (b) Schematics ...](https://www.researchgate.net/publication/221803863/figure/fig1/AS:305624232546305@1449877903277/a-MEMS-structures-with-interdigitated-electrode-7-b-Schematics-of-nanowire-gas.png)








































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![Typical structures of metal-contact RF-MEMS switch [22]. | Download ...](https://www.researchgate.net/profile/Ma-Li-Ya/publication/334903666/figure/fig3/AS:792338976759809@1565919741914/Structure-designs-to-increase-capacitance-ratio_Q640.jpg)






