Lithography Problems
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![Lithography Problems Principle diagram of the lithography machine (From [88]). | Download ...](https://www.researchgate.net/publication/338964507/figure/fig36/AS:853591636066304@1580523513019/Principle-diagram-of-the-lithography-machine-From-88.jpg)





































![Lithography Problems [2209.10814] An alternating direction method of multipliers for inverse ...](https://ar5iv.labs.arxiv.org/html/2209.10814/assets/x1.png)












![Lithography Problems [2209.10814] An alternating direction method of multipliers for inverse ...](https://ar5iv.labs.arxiv.org/html/2209.10814/assets/x5.png)




