Litho Mask Pattern
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![Litho Mask Pattern The role of OPC in photolithography process [42]. Recently, supervised ...](https://www.researchgate.net/publication/364997565/figure/fig1/AS:11431281098328638@1668859127032/The-role-of-OPC-in-photolithography-process-42-Recently-supervised-deep-learning.png)




















