Line Edge Roughness Shorting
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![Current and predicted line edge roughness (LER) [7] | Download ...](https://www.researchgate.net/publication/224517365/figure/fig2/AS:667708500758535@1536205520948/Current-and-predicted-line-edge-roughness-LER-7.png)


















![a) The Line Edge Roughness [10] (b) and (c) Experimental diagram based ...](https://www.researchgate.net/profile/Nor-Zabah-2/publication/271971170/figure/fig3/AS:609358027186176@1522293683556/a-The-Line-Edge-Roughness-10-b-and-c-Experimental-diagram-based-on-AFM-profiles.png)









![11: Line edge roughness model[4] | Download Scientific Diagram](https://www.researchgate.net/profile/Mahesh-Pai/publication/325181675/figure/download/fig13/AS:627056815656960@1526513403160/Line-edge-roughness-model4.png)



































































