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Topdown scanning electron micrograph showing line edge roughness in

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a Schematic definition of line edge roughness LER and line width

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Figure 1 from Direct Evaluation of Gate Line Edge Roughness Impact on

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Figure 1 from Quantitative analysis and modeling of line edge roughness

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Comparison of line edge roughness LER for a 20 nm LER 776 nm

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a Schematic definition of line edge roughness LER and line width

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a Schematic definition of line edge roughness LER and line width

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Figure 1 from Quantitative analysis and modeling of line edge roughness

a Schematic definition of line edge roughness LER and line width

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a Schematic definition of line edge roughness LER and line width

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Figure 1 from Gate Line Edge Roughness Model for Estimation of FinFET

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An example of how the roughness of a line edge relates to a PSD curve

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a Line edge roughness of resist mask after evaporation purple and

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a A topview SEM micrograph showing the presence of edge roughness

The effect of the lineedge roughness Pr on the a timing parameters b

Example of roughness metrics applied to the line shown at the bottom

Diagrams depicting measurement of lineedge roughness and linewidth

a Lineedge roughness based on a 07 1 m 2 topdown SEM

Diagrams depicting measurement of lineedge roughness and linewidth

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Diagrams depicting measurement of lineedge roughness and linewidth

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Figure 3 from Fabricating a highresolution mask with improved line

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Figure 1 from Fabricating a highresolution mask with improved line

a Lineedge roughness based on a 07 1 m 2 topdown SEM

Figure 2 from Surface and lineedge roughness in plasmadeveloped

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Figure 2 from Lineedge roughness transfer function and its application

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Diagrams depicting measurement of lineedge roughness and linewidth

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