Double Patterning Mask Ic
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![Double Patterning Mask Ic [PDF] Pattern decomposition and process integration of self-aligned ...](https://www.researchgate.net/profile/Chia-Chi-Lin-2/publication/252454316/figure/fig1/AS:341277267775489@1458378249578/Pattern-decomposition-flow-for-NAND-FLASH-gate-layer-critical-patterns-with-positive-SADP_Q320.jpg)





