52 Nm
![(a) 52 nm linewidth sparse features in CL1:PAG [2:1] and (b) 50 nm half ...](https://www.researchgate.net/profile/Richard-Palmer-2/publication/253522417/figure/fig4/AS:393297509011467@1470780841288/a-25-nm-half-pitch-dense-features-and-b-15-nm-sparse-features-in-Resist-1-and-c-20_Q640.jpg "52 Nm")
![(a) 52 nm linewidth sparse features in CL1:PAG [2:1] and (b) 50 nm half ...](https://www.researchgate.net/profile/Richard-Palmer-2/publication/253522417/figure/fig6/AS:393297509011474@1470780841718/a-52-nm-linewidth-sparse-features-in-CL1PAG-21-and-b-50-nm-half-pitch-dense.png "52 Nm")
![(a) 52 nm linewidth sparse features in CL1:PAG [2:1] and (b) 50 nm half ...](https://www.researchgate.net/profile/Richard-Palmer-2/publication/253522417/figure/fig5/AS:393297509011470@1470780841584/18-nm-half-pitch-dense-features-in-Resist-2-PEB-was-75-C-for-10-minutes-and-PEB-was-90_Q320.jpg "52 Nm")
![[2602.18840] Beam-Offset Thermoreflectance with Bayesian Optimization ...](https://ar5iv.labs.arxiv.org/html/2602.18840/assets/Figure1.png "52 Nm")
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